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Narrow Bandwitdth Deep UV Lasers  
PAL PRO


Narrow Bandwidth Deep UV Lasers

  • Multiple applications in electronics and medicine.
  • Replace excimer lasers at 248nm and 193nm.
  • 2-5W at 370nm (100-500MHz linewidth respectively).
  • Now used to manufacture "Next Generation" steppers.
  • Ultra-narrow bandwidth (~15 femtometers) make UV interferometry possible.



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